3

Leveling of thin films over uneven substrates during spin coating

Year:
1990
Language:
english
File:
PDF, 1.19 MB
english, 1990
5

Fundamentals of topographic substrate leveling

Year:
1988
Language:
english
File:
PDF, 1.02 MB
english, 1988
14

Planarization during spin coating

Year:
1992
Language:
english
File:
PDF, 1.11 MB
english, 1992
48

Planarization of Substrate Topography by Spin Coating

Year:
1987
Language:
english
File:
PDF, 1.02 MB
english, 1987